Study of CMOS micromachined self-oscillating loop utilizing a phase-locked loop-driving circuit

This work describes the design and characterization of integrated CMOS (complementary metal oxide semiconductor) oscillators comprising a capacitively transduced micromechanical resonator and a phase-locked loop (PLL) driving circuit. Three oscillator schemes are studied and compared, including direct feedback, direct feedback containing a PLL and hybrid direct feedback plus a PLL. PLL is known for its capability in automatic tuning and tracking of a reference signal. Inclusion of a PLL is beneficial for sustaining oscillations at resonant frequencies within its capture range. The micromechanical resonator has a measured resonant frequency of 117.3 kHz. The CMOS PLL circuit has a closed-loop bandwidth of 1.8 kHz with a capture range between 111 kHz and 118.4 kHz. The start-up times for oscillation are shortened in the two schemes utilizing a PLL, since it provides an initial driving signal at its free-running frequency. The lock-in time is also reduced by increasing the proportion of PLL drive in the hybrid scheme. The measured noises for the three oscillator schemes are similar with a value of −75 dB below the resonant peak at a 10 Hz offset. (paper)