Published 2013
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Composition and morphology of (Ti, W) coatings deposited on silicon at ion assistance
- 1. Belorusskij Gosudarstvennyj Tekhnologicheskij Univ., Minsk (Belarus)
- 2. Belorusskij Gosudarstvennyj Pedagogicheskij Univ., Minsk (Belarus)
Description
no abstract available
Files
48077058.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Состав и морфология покрытий (Ти, W), осажденных на кремний при ионном ассистировании
Publishing Information
- Publisher
- Izd-vo MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLIII International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 182 p.
- Journal Page Range
- p. 106
- Report number
- INIS-RU--604
Conference
- Title
- 43. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLIII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 28-30 May 2013
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 48077058
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- AMORPHOUS STATE; ENERGY BEAM DEPOSITION; EXPERIMENTAL DATA; GRAIN SIZE; ION BEAMS; KEV RANGE 01-10; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON; STRUCTURAL CHEMICAL ANALYSIS; SUBSTRATES; THIN FILMS; TITANIUM IONS; TITANIUM SILICIDES; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN IONS; TUNGSTEN SILICIDES
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; DATA; DEPOSITION; ELECTRON MICROSCOPY; ELEMENTS; ENERGY RANGE; FILMS; INFORMATION; IONS; KEV RANGE; MICROSCOPY; MICROSTRUCTURE; NUMERICAL DATA; REFRACTORY METAL COMPOUNDS; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; SIZE; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TUNGSTEN COMPOUNDS
Optional Information
- Notes
- Imprint:Tezisy dokladov XLIII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami