Analysis of surface composition and internal structure of fly ash particles using an ion and electron multibeam microanalyzer

An ion and electron multibeam microanalyzer was developed and applied to analysis of coal fly ash particles. Employing ordinary TOF-SIMS function, it was found that the surface of the fly ash particles mainly consisted of Ca, C, Si, and Na. A special analysis technique with a combination of ''shave-off'' cross-sectioning and TOF-SIMS mapping of the cross section was adopted to a single fly ash particle in order to reveal the internal structure. It was found that the particle had a cenosphere structure. TOF-SIMS mapping of the cross-sectioned particle clarified that the particle had the following layers, outermost layer (Na, Si, Ca-rich), shell (Na-rich), inner shell (Na, Si, Al-rich)