Angular and energy distributions of ions passed through monocrystal metal films

The angular distribution and energy spectra of 10 to 25 keV ions of Na+, K+, Rb+ passed through monocrystal copper films have been studied. The energy spectra of the ions are shown to exhibit three maxima due to the ions passed as a result of axial-, planar channeling and random motion. The effect of radiation-induced distortions introdUced by ion implantation in the monocrystalline film on the angular- and energy distribution of the passed ions has been studied. The relationship between orientation effects observed during passage and defect types in the crystal lattice is established