Published May 1996 | Version v1
Journal article

Coherent anti-Stokes Raman scattering performed on expanding thermal arc plasmas

  • 1. Eindhoven University of Technology, Department of Physics, P. O. Box 513, 5600 MB Eindhoven (The Netherlands)

Description

The expanding plasma emanating from a thermal arc plasma source that can be used for deposition of thin films is studied using laser spectroscopic techniques. The argon-hydrogen plasma is characterized by very fast recombination that cannot be explained by atomic processes. To explore this phenomenon, which has been related to wall association of hydrogen atoms and recirculation, CARS (coherent anti-Stokes Raman scattering) is performed on (argon-)hydrogen plasmas. The periphery of the plasma appears to be rich in hydrogen molecules, in accordance with the recirculation model. No highly rovibrationally excited states are detected in the periphery, in spite of the spectrometer close-quote s very good sensitivity (0.1 Pa H2 at 300 K). For the plasma, rotational and vibrational temperatures as well as absolute H2 densities are measured. A simple model for the observed (non-Boltzmann) rotational populations is developed. copyright 1996 The American Physical Society

Additional details

Publishing Information

Journal Title
Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Journal Volume
53
Journal Issue
5
Journal Page Range
p. 5207-5217.
ISSN
1063-651X
CODEN
PLEEE8