Improvement in laser-based micro-processing of carbon nanotube film devices
Creators
- 1. National Institute of Advanced Industrial Science and Technology (AIST), Sensing System Research Center, Tosu, Saga (Japan)
- 2. National Institute of Advanced Industrial Science and Technology (AIST), Research Institute for Advanced Electronics and Photonics, Tsukuba, Ibaraki (Japan)
- 3. RIKEN Center for Advanced Photonics, Wako, Saitama (Japan)
Description
Carbon nanotubes (CNTs) are considered remarkable low-dimensional materials that can overcome the problems associated with bulk semiconductors. The development of CNT processing technology complementing conventional processing technology is required to advance research on CNT devices. We assessed the potential and application of laser-based micro-processing for patterning micrometre-thick CNT films. We discovered that the laser ablation method can pattern micrometre-thick CNT films in micrometre spatial resolution and can directly pattern the CNT films inside the protective film-features not achievable by competing processing technologies. Thus, the laser ablation method is uniquely advantageous and applicable in manufacturing functional CNT devices. (author)
Availability note (English)
Available from DOI: https://doi.org/10.35848/1882-0786/ac4d06Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics Express (Online)
- Journal Volume
- 15
- Journal Issue
- 2
- Journal Page Range
- p. 026503.1-026503.4
- ISSN
- 1882-0786
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 54010826
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- ABLATION; BEAM SPLITTING; CAPACITORS; CARBON NANOTUBES; CONTAMINATION; CRYSTAL LATTICES; ELECTRONS; ENCAPSULATION; ENERGY ABSORPTION; GRAPHENE; LASER RADIATION; SEMICONDUCTOR DEVICES; SPATIAL RESOLUTION; WAVELENGTHS
- Descriptors DEC
- ABSORPTION; CARBON; CRYSTAL STRUCTURE; ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; ELEMENTARY PARTICLES; ELEMENTS; EQUIPMENT; FERMIONS; LEPTONS; NANOSTRUCTURES; NANOTUBES; NONMETALS; RADIATIONS; RESOLUTION; SORPTION
Optional Information
- Notes
- 26 refs., 6 figs., 1 tab.