Published February 2022 | Version v1
Journal article

Improvement in laser-based micro-processing of carbon nanotube film devices

  • 1. National Institute of Advanced Industrial Science and Technology (AIST), Sensing System Research Center, Tosu, Saga (Japan)
  • 2. National Institute of Advanced Industrial Science and Technology (AIST), Research Institute for Advanced Electronics and Photonics, Tsukuba, Ibaraki (Japan)
  • 3. RIKEN Center for Advanced Photonics, Wako, Saitama (Japan)

Description

Carbon nanotubes (CNTs) are considered remarkable low-dimensional materials that can overcome the problems associated with bulk semiconductors. The development of CNT processing technology complementing conventional processing technology is required to advance research on CNT devices. We assessed the potential and application of laser-based micro-processing for patterning micrometre-thick CNT films. We discovered that the laser ablation method can pattern micrometre-thick CNT films in micrometre spatial resolution and can directly pattern the CNT films inside the protective film-features not achievable by competing processing technologies. Thus, the laser ablation method is uniquely advantageous and applicable in manufacturing functional CNT devices. (author)

Availability note (English)

Available from DOI: https://doi.org/10.35848/1882-0786/ac4d06

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Express (Online)
Journal Volume
15
Journal Issue
2
Journal Page Range
p. 026503.1-026503.4
ISSN
1882-0786

Optional Information

Notes
26 refs., 6 figs., 1 tab.