Elemental analysis by micro fluorescent x-ray analysis

The usefulness of microprobe X-ray fluorescence method for the elemental analysis from sodium to uranium of environmental materials and functional materials used in modern industries is described. A conventional desktop type X-ray fluorescent spectrometer (XGT-5000) with small spot analysis is combined with an X-ray guide tube (mono-capillary made of glass) offering high intensity X-ray beams with diameters ranging from 3 mm down to a unique 10 μm. Qualitative and quantitative elemental analysis is possible even for microscopic particles and mapping technique provides element distribution images. Some applications using real samples are demonstrated. (S.Ohno)