Published July 1995 | Version v1
Book

The preparation of YBa2Cu3O7-x-films by plasma flash evaporation

Description

Plasma flash evaporation, a process using a high-power inductively coupled thermal plasma to vaporise fine powders, was employed to deposit high-temperature superconducting YBa2Cu3O7-x films on SrTiO3 and YSZ substrates. The films were c-axis oriented and had transition temperatures around 90 K. Their critical current density exceeded 200 kA/cm2 in the case of SrTiO3 substrates, but was considerably lower for YSZ. The deposition rate of up to some hundred nm/min makes plasma flash evaporation a competitive process as compared to sputtering and pulsed laser deposition. It is expected that the process can be scaled up to enable large-area deposition at high rates

Additional details

Publishing Information

Publisher
Organizing Committees of the 12th International Symposium on Plasma Chemistry.
Imprint Place
Minnesota, MN (United States)
Imprint Title
12th International symposium on plasma chemistry. Proceedings, Volume 4
Imprint Pagination
615 p.
Journal Page Range
p. 1993-1998.

Conference

Title
12. international symposium on plasma chemistry.
Dates
21-25 Aug 1995.
Place
Minneapolis, MN (United States).

Optional Information

Secondary number(s)
CONF-950875--Vol.4.