Published 2004 | Version v1
Miscellaneous Metadata-only

Synthesis of iron disilicide in Fe-implanted Si layers under the action of pulsed ion and laser beams

Creators

  • 1. Kazan Physical-Technical Institute, RAS, Kazan (Russian Federation)
  • 2. Institute of Electronics, NAS, Minsk (Belarus)
  • 3. Belarussian State University, Minsk (Belarus)
  • 4. KFKI Research Institute for Particle and Nuclear Physics, Budapest (Hungary)

Description

no abstract available

Part of:
Abstracts of 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004

Additional details

Publishing Information

Imprint Title
Abstracts of 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004
Imprint Pagination
257 p.
Journal Page Range
p. 81

Conference

Title
5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004
Dates
14-17 Jun 2004
Place
Kazimierz Dolny (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
36060077
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
ANNEALING; ATOMIC FORCE MICROSCOPY; CARBON IONS; CRYSTAL STRUCTURE; DEPTH; ION BEAMS; ION IMPLANTATION; IRON IONS; IRON SILICIDES; LASER RADIATION; LAYERS; PHASE STUDIES; PULSE TECHNIQUES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPATIAL DISTRIBUTION; SUBSTRATES; SURFACE PROPERTIES; SYNTHESIS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION
Descriptors DEC
BEAMS; CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; DIMENSIONS; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; HEAT TREATMENTS; IONS; IRON COMPOUNDS; MICROSCOPY; RADIATIONS; SCATTERING; SILICIDES; SILICON COMPOUNDS; SPECTROSCOPY; TRANSITION ELEMENT COMPOUNDS

Optional Information

Contract/Grant/Project number
RAS grant no. T 343323 (OTKA) and grant no. 1904.2003.2