Spatial resolution of electron probe X-ray microanalysis on sections of organic (biological) material

A locally enhanced element concentration influences the result of an X-ray microanalysis at a neighbouring position. This influence was investigated for the first time systematically in organic (biological) material using sections of epoxy resin (thickness 0.5-2.5 μm) containing a layer of pure gold. Wavelength and energy dispersive spectrometers were applied to analyse the X-rays generated by 15-35 keV electrons. Characteristic X-rays could be detected up to distances of several μm from the gold layer. For example, for a 2.4 μm thick section and 35 keV electrons the measured apparent gold concentration was above 0.1% (weight% per dry mass) at a distance of 10 μm. Thus, the lateral resolution may be not better than a multiple of the section thickness. The apparent gold concentration at a given distance is proportional to the specimen thickness and increases with increasing electron energy. Monte Carlo simulations confirm the experimental results. The influence of a local enrichment depends on the particular specimen properties (e.g. thickness, density, mean atomic number), the electron energy, and the geometry of the detector with respect to the specimen. (Copyright (c) 1999 Elsevier Science B.V., Amsterdam. All rights reserved.)