Published 1994
| Version v1
Miscellaneous
Radio-frequency discharge in helium used for plasma-chemical deposition of epitaxial layers
- 1. Nizhni Novgorod Univ. (Russian Federation). Faculty of Applied Physics
- 2. Universidade Federal Fluminense, Niteroi, RJ (Brazil). Inst. de Fisica
Description
A model is proposed and results of calculations of the discharge kinetics and the steady electron density and temperature are presented for a radio-frequency discharge in helium at p ∼ 1 Torr used to simulate gas-phase epitaxy. Fitting film deposition experimental data the electron-impact dissociation rates for Te(C H3)2 and Cd(C H3)2 molecules are evaluated. (author). 9 refs, 4 figs
Additional details
Publishing Information
- Imprint Title
- Proceedings of the 1994 International Conference on Plasma Physics; 6 Latin American Workshop on Plasma Physics. v. 3
- Imprint Pagination
- 443 p.
- Journal Page Range
- p. 361-364.
Conference
- Title
- 1994 International Conference on Plasma Physics; 6. Latin American Workshop on Plasma Physics; 10. Kiev International Conference on Plasma Theory; 10. International Congress on Waves and Instabilities in Plasmas.
- Dates
- 31 Oct - 4 Nov 1994.
- Place
- Foz do Iguacu, PR (Brazil).
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 26078790
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; ELECTRON DENSITY; ELECTRON TEMPERATURE; ELECTRONS; HELIUM; HIGH-FREQUENCY DISCHARGES; HIGH-FREQUENCY HEATING; IONIZED GASES; PLASMA; PLASMA PRODUCTION; VAPOR PHASE EPITAXY
- Descriptors DEC
- CHEMICAL COATING; CRYSTAL GROWTH METHODS; DEPOSITION; ELECTRIC DISCHARGES; ELEMENTARY PARTICLES; ELEMENTS; EPITAXY; FERMIONS; FLUIDS; GASES; HEATING; LEPTONS; NONMETALS; PLASMA HEATING; RARE GASES; SURFACE COATING