Published December 1994
| Version v1
Journal article
Determination of electron concentration in an RF discharge using a Fabri-Perot cavity
- 1. St. Petersburg State Technical Univ. (Russian Federation)
Description
A method of determining the electron concentration in an RF discharge plasma in diode systems based on measuring the parameters of a Fabri-Perot cavity in the 6-10 mm wavelength band is described. The cavity is formed by the aluminum electrodes of a discharge chamber, and its Q-factor in experiments can reach 2000. The detection limit with respect to electron concentration is 4·108 cm-3
Additional details
Publishing Information
- Journal Title
- Instruments and Experimental Techniques
- Journal Volume
- 37
- Journal Issue
- 3
- Journal Page Range
- p. 342-344.
- ISSN
- 0020-4412
- CODEN
- INETAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27039215
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Translation
- Descriptors DEI
- ELECTRON DENSITY; ETCHING; FABRY-PEROT INTERFEROMETER; HIGH-FREQUENCY DISCHARGES; PERFORMANCE; PLASMA DIAGNOSTICS; PLASMA PRODUCTION; SEMICONDUCTOR MATERIALS
- Descriptors DEC
- ELECTRIC DISCHARGES; INTERFEROMETERS; MATERIALS; MEASURING INSTRUMENTS
Optional Information
- Notes
- Cover-to-cover Translation of Pribory I Tekhnika Eksperimenta (USSR); Translated from Pribory i Tekhnika Eksperimenta; No. 3, 129-132(May-Jun 1994).