The calibration method of the circle-structured light measurement system for inner surfaces considering systematic errors
- 1. State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072 (China)
Description
Light plane deviation and motion direction deviation of stage systems are the two main sources of systematic errors in circle-structured light inner surface measurement systems. In this paper, we propose a new two-step calibration method to compensate these systematic errors. In the first step, a more accurate initial light plane calibration result is obtained by multi-position binocular-structured light calibration. Then, in the second step, the initial result is optimized by measuring the inner radius of a standard ring gauge to obtain the optimal light plane calibration result. Based on this result, the real motion direction is also calibrated by optimization using the inner surface scanning measurement data of the standard ring gauge. The proposed method improves the system calibration accuracy through the second calibration step, making it convenient to operate without using complex calibration targets or expensive equipment. Therefore, this calibration method has the potential to be used in actual measurements. The experimental results show that the mean relative measurement error can reach 0.015% in our homemade measurement system and validate that the measurement system calibrated by our proposed method realizes high-precision and high-repeatability measurements for inner surfaces. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-6501/abe288Additional details
Identifiers
Publishing Information
- Journal Title
- Measurement Science and Technology
- Journal Volume
- 32
- Journal Issue
- 7
- Journal Page Range
- [12 p.]
- ISSN
- 0957-0233
- CODEN
- MSTCEP
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 53046111
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- ACCURACY; CALIBRATION; EQUIPMENT; ERRORS; POTENTIALS; STANDARDS; SURFACES