Published December 1993 | Version v1
Book Metadata-only

Operation and application of 100 kV ion implanter

Creators

Description

no abstract available

Additional details

Publishing Information

Publisher
Atomic Energy Press
Imprint Place
Beijing (China)
ISBN
7-5022-0983-2
Imprint Title
Institute of Modern Physics, Academia Sinica annual report (1992, January-December)
Imprint Pagination
180 p.
Journal Page Range
p. 25

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
29060275
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
BEAM CURRENTS; EQUIPMENT; ION IMPLANTATION; ION SOURCES; OPERATION; PARAMETRIC ANALYSIS; USES
Descriptors DEC
CURRENTS