Published 1985 | Version v1
Book

Plasma Electrode

Creators

  • 1. Dept. of Electrical Engineering, Tohoku Univ., Sendai 980

Description

''Plasma Electrode'' is proposed by the author for an electrode which charged particles play an important role. The frequency ranges from DC to high frequencies. RF plasma electrodes which are mainly described becomes important in addition to DC plasma electrodes. The RF plasma electrodes are classified as follows: a. Active RF Plasma Electrode; b. Passive RF Plasma Electrode; c. Linear RF Plama Electrode; d. Nonlinear RF plasma Electrode

Additional details

Publishing Information

Publisher
IEEE Service Center.
Imprint Place
Piscataway, NJ (USA)
Imprint Title
Conference record of the 1985 IEEE international conference on plasma science
Journal Page Range
p. 86.

Conference

Title
Conference on plasma sciences.
Dates
3-5 Jun 1985.
Place
Pittsburgh, PA (USA).