Annealing of PEEK, PET and PI implanted with Co ions at high fluencies

The properties of implanted polymers strongly depend on the implantation ion fluence and on the properties of the implanted atoms. The stability of synthesized nano-structures during further technological steps like annealing is of importance for their possible applications. Polyimide (PI), polyetheretherketone (PEEK), and polyethyleneterephtalate (PET) were implanted with 40 keV Co+ ions at room temperature at fluences ranging from 0.2 × 1016 cm−2 to 1.0 × 1017 cm–2 and annealed at a temperature of 200 °C. The implanted depth profiles of as-implanted and annealed samples, determined by the RBS method, were compared with the results of SRIM 2012 simulations. The structural and compositional changes of the implanted and subsequently annealed polymers were characterized by RBS and UV–vis spectroscopy. The surface morphology of as-implanted and annealed samples was examined by the AFM method and their electrical properties by sheet resistance measurement