Published May 1996
| Version v1
Journal article
Field emission from diamond coated molybdenum field emitters
- 1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695 (United States)
- 2. United States Army Research Laboratory, Fort Monmouth, New Jersey 07703 (United States)
- 3. Institute of Crystallography, 117333 Moscow (Russia)
Description
Diamond deposition onto single Mo field emitters was accomplished by two methods: microwave plasma chemical vapor deposition and a dielectrophoresis of diamond powder. Observation by transmission electron microscopy and scanning electron microscopy revealed a significant amount of deposition at the tips. The field emission characteristics were measured before and after diamond deposition on the same emitters. Field emission from diamond coated emitters yielded significant increases in emission current and lower Fowler endash Nordheim slopes. We discuss a possible mechanism to explain current enhancement that depends primarily upon the Mo-diamond interface. copyright 1996 American Vacuum Society
Additional details
Additional titles
- Augmented title (English)
- Mo; diamonds
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Journal Volume
- 14
- Journal Issue
- 3
- Journal Page Range
- p. 2050-2055.
- ISSN
- 0734-211X
- CODEN
- JVTBD9
Conference
- Title
- 8. international vacuum microelectronics conference.
- Dates
- 30 Jul - 3 Aug 1995.
- Place
- Portland, OR (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27074066
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CATHODES; CHEMICAL VAPOR DEPOSITION; DIAMONDS; FIELD EMISSION; MICROSTRUCTURE; MOLYBDENUM
- Descriptors DEC
- CARBON; CHEMICAL COATING; CRYSTAL STRUCTURE; DEPOSITION; ELECTRODES; ELEMENTS; EMISSION; METALS; MINERALS; NONMETALS; SURFACE COATING; TRANSITION ELEMENTS
Optional Information
- Secondary number(s)
- CONF-9507110--.