Plasmochemical reactions of fluorine and fluorides

Experimental data, obtained by different authors mainly after 1969, on the reactions of fluorine and fluorides in nonequilibrium plasma of electric discharges (subnormal, high-frequency, superhigh-frequency and barrier discharges) are considered. Conditions and mechanisms of plasmochemical preparation of nitrogen fluorides, trifluoroamine oxide, tetrafluoroammonium salts, oxygen fluorides, halogen fluorides, noble gas fluorides etc., are discussed. It is pointed out that the yield of the reaction products depends on many factors and is determined, in particular, by the thermal stability of the product, its stability in the discharge zone, its inertness with regard to the apparatus walls