Published May 1993 | Version v1
Journal article

Technological ion source

Description

The ion source of different gases (including Ar, N2, O2 at al) is described. It provides in the continuos regime. For ion generation the independent contracted cathode and the two-cascade circuit of electron multiplication are used

Additional details

Additional titles

Original title (Russian)
Технологический источник ионов

Publishing Information

Journal Title
Pribory i Tekhnika Ehksperimenta
Journal Issue
no.3
Journal Page Range
p. 215-218.
ISSN
0032-8162
CODEN
PRTEAJ

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
25023474
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
AMP BEAM CURRENTS; DIAGRAMS; ELECTRIC CONDUCTIVITY; ELECTRODES; PENNING ION SOURCES; PERFORMANCE
Descriptors DEC
BEAM CURRENTS; CURRENTS; ELECTRICAL PROPERTIES; INFORMATION; ION SOURCES; PHYSICAL PROPERTIES