Analysis of multicomponent targets using H+ and He+ fast ion backscattering

Spectra unfolding method is described for backscattering of H+ and He+ fast ions. The method permits to find the distribution of ratios of concentrations of atoms of a N-component target. When calculating concentrations the shift of moderation cross sections in the depth target is taken into accoUnt. The above method is tested when processing spectra calculated Using a compUter for the giVen concentration distributions. Ion struggling, equipment expansion and fluctuations of reference number in spectra, are calculated. The test using targets of different composi=. tion has shown that the main errors are brought by spectrum distortions connected with equipment expansion