Published January 1994 | Version v1
Journal article

Realization of limited-area cathodes and their performance in an electron optical column

  • 1. Univ. of Cambridge (United Kingdom)

Description

Limited-area cathodes based upon impregnated dispenser cathod material have been investigated in an electron optical column at accelerating voltages of up to 30 kV. A peak axial brightness of about 6 X 105 A/cm2 sr was obtained at this voltage using a flat cathode. Brightness values greater by a factor of 10 were measured using a conical limited-area cathode with a tip radius of curvature of 0.075 mm. The latter measurements were affected by space-charge spreading in the beam. 7 refs., 6 figs., 1 tab

Additional details

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
Journal Volume
12
Journal Issue
1
Journal Page Range
p. 26-30.
ISSN
0734-211X
CODEN
JVTBD9

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
27026715
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
CATHODES; ELECTRON BEAMS; ELECTRON SOURCES; PERFORMANCE; SPACE CHARGE
Descriptors DEC
BEAMS; ELECTRODES; LEPTON BEAMS; PARTICLE BEAMS; PARTICLE SOURCES; RADIATION SOURCES