Published January 1994
| Version v1
Journal article
Realization of limited-area cathodes and their performance in an electron optical column
- 1. Univ. of Cambridge (United Kingdom)
Description
Limited-area cathodes based upon impregnated dispenser cathod material have been investigated in an electron optical column at accelerating voltages of up to 30 kV. A peak axial brightness of about 6 X 105 A/cm2 sr was obtained at this voltage using a flat cathode. Brightness values greater by a factor of 10 were measured using a conical limited-area cathode with a tip radius of curvature of 0.075 mm. The latter measurements were affected by space-charge spreading in the beam. 7 refs., 6 figs., 1 tab
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Journal Volume
- 12
- Journal Issue
- 1
- Journal Page Range
- p. 26-30.
- ISSN
- 0734-211X
- CODEN
- JVTBD9
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27026715
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- CATHODES; ELECTRON BEAMS; ELECTRON SOURCES; PERFORMANCE; SPACE CHARGE
- Descriptors DEC
- BEAMS; ELECTRODES; LEPTON BEAMS; PARTICLE BEAMS; PARTICLE SOURCES; RADIATION SOURCES