Secondary ion emission from silicon and arginine targets bombarded with large Ar cluster ions
- 1. Kyoto Univ., Quantum Science and Engineering Center, Kyoto (Japan)
- 2. Kyoto Univ., Dept. of Nuclear Engineering, Kyoto (Japan)
- 3. Kyoto Univ., Dept. of Electronic Science and Engineering, Kyoto (Japan)
Description
Secondary ions emitted from Si and arginine targets have been investigated under large Ar cluster ion bombardment. Incident ion beams with energies from 7.5 to 30 keV were used and the mean size of the Ar cluster ion beams was about 1000 atoms per cluster. The effects of incident cluster-ion size on secondary ion spectra were investigated under bombardment by size-selected Ar cluster ions. The yields of secondary cluster ions such as Si6+ ions increased rapidly with incident size relative to Si+. On the other hand, molecular ions of arginine and characteristic fragment ions were measured with high sensitivity. When large Ar cluster ions such as Ar1500 were incident on the arginine target, molecular ions of arginine were measured with small amounts of fragment ions. (author)
Additional details
Publishing Information
- Journal Title
- Annual Report of Quantum Science and Engineering Center
- Journal Volume
- 9
- Journal Page Range
- p. 42-47
- ISSN
- 1345-0700
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 39108873
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGININE; ARGON; ION MICROPROBE ANALYSIS; ION PAIRS; IONS; IRRADIATION; MASS SPECTROSCOPY; SECONDARY EMISSION; SEMICONDUCTOR DEVICES; SILICON; TARGETS; TIME-OF-FLIGHT SPECTROMETERS
- Descriptors DEC
- AMINO ACIDS; CARBOXYLIC ACIDS; CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; EMISSION; FLUIDS; GASES; MEASURING INSTRUMENTS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NONMETALS; ORGANIC ACIDS; ORGANIC COMPOUNDS; RARE GASES; SEMIMETALS; SPECTROMETERS; SPECTROSCOPY
Optional Information
- Notes
- 19 refs., 5 figs.