Published 1993
| Version v1
Miscellaneous
Effect of wurtzite phase annealing in silicon at high current densities of As+ beam
Creators
Description
Short communication
Additional details
Additional titles
- Original title (Russian)
- Эффект отжига вюрцитной фазы в кремнии при высоких плотностях тока пучка Ас
Publishing Information
- Imprint Title
- Thesises of the proceedings of the 23. International meeting on the physics of charged particle interaction with crystals
- Imprint Pagination
- 148 p.
- Journal Page Range
- p. 75.
- Report number
- INIS-RU--377
Conference
- Title
- 23. International meeting on the physics of charged particle interaction with crystals.
- Original Conference Title
- 23. Mezhnatsional'noe soveshchanie po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 1993.
- Place
- Moscow (Russian Federation).
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 25051476
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- AMORPHOUS STATE; ANNEALING; ARSENIC IONS; CRYSTAL-PHASE TRANSFORMATIONS; CRYSTALLIZATION; EPITAXY; FLUX DENSITY; ION BEAMS; KEV RANGE 100-1000; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; RADIATION FLUX; SILICON; SURFACES
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CRYSTAL GROWTH METHODS; CRYSTALS; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; IONS; KEV RANGE; PHASE TRANSFORMATIONS; RADIATION EFFECTS; SEMIMETALS