Development of electroplated magnetic materials for MEMS

Permalloy (19%Ni-81%Fe alloy) and nickel have thus far found the most utility in magnetic-Micro Electro Mechanical Systems (MEMS), because the technologies necessary for depositing and micromachining them have been well-developed previously by the data storage industry. However, other high performance soft magnetic materials and hard magnetic materials have unique advantages that are driving their integration with MEMS/NEMS. These include enhanced magnetic properties, corrosion resistance, electrical resistivity, and reduced films stress. The primary issues associated with the integration of these magnetic materials in MEMS/NEMS are discussed