Published 1986
| Version v1
Book
Organometallic compounds of the 2-6 group elements of periodic system as perspective substances for microelectrnics
Creators
Description
Results of investigating methods of preparation and analysis of organometallic compounds (OMC) of the 2B-6B group elements, behaviour of microimpurities in the process of their complete purification, physical-chemical properties for developing rational flowsheets of OMC purification are presented. Results of microimpurities quantitative transition from OMC to gallium arsenide epitaxial layers are presented. Prospects for OMC application in microelectronics are discussed
Additional details
Additional titles
- Original title (Russian)
- Металлоорганические соединения элементов 2-6 групп периодической системы-перспективные вещества для микроэлектроники
Publishing Information
- Publisher
- Nauka.
- Imprint Place
- Novosibirsk (USSR)
- Imprint Title
- Problems of materials science
- Journal Page Range
- p. 50-61.
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 18093561
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- CADMIUM COMPOUNDS; CHEMICAL PREPARATION; FLOWSHEETS; IMPURITIES; INDIUM COMPOUNDS; ORGANOMETALLIC COMPOUNDS; PURIFICATION; USES
- Descriptors DEC
- DIAGRAMS; INFORMATION; ORGANIC COMPOUNDS; SYNTHESIS
Optional Information
- Notes
- 25 refs.; 1 fig.; 7 tabs. Imprint:Problemy ehlektronnogo materialovedeiya.