Rapid fabrication of microfluidic chips based on the simplest LED lithography
Creators
- 1. Department of Thermal Science and Energy Engineering, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui, 230027 (China)
- 2. School of Life Sciences, University of Science and Technology of China, 96 Jinzhai Road, Hefei, Anhui, 230027 (China)
- 3. National Center for Protein Science Shanghai, Institute of Biochemistry and Cell Biology, Shanghai Institutes for Biological Sciences, CAS, Shanghai, 201210 (China)
Description
Microfluidic chips are generally fabricated by a soft lithography method employing commercial lithography equipment. These heavy machines require a critical room environment and high lamp power, and the cost remains too high for most normal laboratories. Here we present a novel microfluidics fabrication method utilizing a portable ultraviolet (UV) LED as an alternative UV source for photolithography. With this approach, we can repeat several common microchannels as do these conventional commercial exposure machines, and both the verticality of the channel sidewall and lithography resolution are proved to be acceptable. Further microfluidics applications such as mixing, blood typing and microdroplet generation are implemented to validate the practicability of the chips. This simple but innovative method decreases the cost and requirement of chip fabrication dramatically and may be more popular with ordinary laboratories. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0960-1317/25/5/055020Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Journal Volume
- 25
- Journal Issue
- 5
- Journal Page Range
- [7 p.]
- ISSN
- 0960-1317
- CODEN
- JMMIEZ
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47079838
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- BLOOD; EQUIPMENT; FABRICATION; FLUIDIC DEVICES; MIXING; RESOLUTION; ULTRAVIOLET RADIATION
- Descriptors DEC
- BIOLOGICAL MATERIALS; BODY FLUIDS; ELECTROMAGNETIC RADIATION; MATERIALS; RADIATIONS