Published May 15, 2006
| Version v1
Journal article
Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles
- 1. Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki, Miyazaki 889-2192 (Japan)
Description
We demonstrated a low-debris, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO2) nanoparticles. By using a low SnO2 concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris
Additional details
Identifiers
- DOI
- 10.1063/1.2206131;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 88
- Journal Issue
- 20
- Journal Page Range
- p. 201503-201503.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37083602
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- EFFICIENCY; EXTREME ULTRAVIOLET RADIATION; LASER-PRODUCED PLASMA; LASERS; NANOSTRUCTURES; PARTICLES; PLASMA DIAGNOSTICS; PLASMA JETS; PLASMA PRODUCTION; PULSES; SOLUTIONS; TIN OXIDES
- Descriptors DEC
- CHALCOGENIDES; DISPERSIONS; ELECTROMAGNETIC RADIATION; HOMOGENEOUS MIXTURES; MIXTURES; OXIDES; OXYGEN COMPOUNDS; PLASMA; RADIATIONS; TIN COMPOUNDS; ULTRAVIOLET RADIATION
Optional Information
- Notes
- (c) 2006 American Institute of Physics