Published 2014
| Version v1
Miscellaneous
Open
Study of defect generation and recrystallization in silicon-on-sapphire films under ion irradiation
- 1. NIIYaF MGU, Moscow (Russian Federation)
Description
no abstract available
Files
49043628.pdf
Files
(194.0 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:55f7db6549b99b2104377f44ea77d581
|
194.0 kB | Preview Download |
System files
(3.1 kB)
| Name | Size | Download all |
|---|
Additional details
Additional titles
- Original title (Russian)
- Исследование дефектообразования и рекристаллизации в пленках кремния на сапфире при ионном облучении
Publishing Information
- Publisher
- Izd-vo MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLIV International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 202 p.
- Journal Page Range
- p. 125
- Report number
- INIS-RU--605
Conference
- Title
- 44. international Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLIV mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 27-29 May 2014
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 49043628
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- AMORPHOUS STATE; CRYSTAL DEFECTS; EXPERIMENTAL DATA; ION BEAMS; ION IMPLANTATION; KEV RANGE 100-1000; RADIATION DOSES; RECRYSTALLIZATION; SAPPHIRE; SILICON; SILICON IONS; TEMPERATURE DEPENDENCE; THIN FILMS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CORUNDUM; CRYSTAL STRUCTURE; DATA; DOSES; ELEMENTS; ENERGY RANGE; FILMS; INFORMATION; IONS; KEV RANGE; MINERALS; NUMERICAL DATA; OXIDE MINERALS; SEMIMETALS
Optional Information
- Notes
- Imprint:Tezisy dokladov XLIV mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami