Published 2014 | Version v1
Miscellaneous Open

Study of defect generation and recrystallization in silicon-on-sapphire films under ion irradiation

  • 1. NIIYaF MGU, Moscow (Russian Federation)

Description

no abstract available

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Part of:
Summaries of reports of XLIV International Tulinov conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Исследование дефектообразования и рекристаллизации в пленках кремния на сапфире при ионном облучении

Publishing Information

Publisher
Izd-vo MGU
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XLIV International Tulinov conference on physics of interactions of charged particles with crystals
Imprint Pagination
202 p.
Journal Page Range
p. 125
Report number
INIS-RU--605

Conference

Title
44. international Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
XLIV mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
27-29 May 2014
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
49043628
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
AMORPHOUS STATE; CRYSTAL DEFECTS; EXPERIMENTAL DATA; ION BEAMS; ION IMPLANTATION; KEV RANGE 100-1000; RADIATION DOSES; RECRYSTALLIZATION; SAPPHIRE; SILICON; SILICON IONS; TEMPERATURE DEPENDENCE; THIN FILMS
Descriptors DEC
BEAMS; CHARGED PARTICLES; CORUNDUM; CRYSTAL STRUCTURE; DATA; DOSES; ELEMENTS; ENERGY RANGE; FILMS; INFORMATION; IONS; KEV RANGE; MINERALS; NUMERICAL DATA; OXIDE MINERALS; SEMIMETALS

Optional Information

Notes
Imprint:Tezisy dokladov XLIV mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami