Published 2005
| Version v1
Book
Channeling effect on implantation process at materials irradiation by argon ion beam with Gaussian-type energy spectrum
Creators
- 1. Moskovskij Inzhenerno-Fizicheskij Inst. (Gosudarstvennyj Univ.), Moscow (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Влияние каналирования на процесс имплантации при облучении материалов пучком ионов аргона с гауссоподобным энергетическим спектром
Publishing Information
- Publisher
- UNTs DO
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 5-88800-297-6
- Imprint Title
- Summaries of reports of XXXV International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 200 p.
- Journal Page Range
- p. 125
Conference
- Title
- XXXV International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXV Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 2005
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38082852
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ARGON IONS; BERYLLIUM; CARBON; COPPER; DEPTH; ENERGY LOSSES; EVALUATED DATA; GAUSSIAN PROCESSES; HELIUM IONS; ION BEAMS; ION CHANNELING; ION IMPLANTATION; KEV RANGE 10-100; MOLYBDENUM; PHYSICAL RADIATION EFFECTS; SILICON; SPATIAL DISTRIBUTION; TARGETS; TUNGSTEN
- Descriptors DEC
- ALKALINE EARTH METALS; BEAMS; CHANNELING; CHARGED PARTICLES; DATA; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; LOSSES; METALS; NONMETALS; NUMERICAL DATA; RADIATION EFFECTS; REFRACTORY METALS; SEMIMETALS; TRANSITION ELEMENTS
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XXXV Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami