Published April 1975 | Version v1
Journal article Metadata-only

Ion implantation: possibilities and exploitation

Creators

  • 1. Universita J.E. Purkyne, Brno (Czechoslovakia). Prirodovedecka Fakulta

Description

Ion implantation offers new possibilities to solid state physics and to various industrial branches. The applications of the method are outlined and its prospective use is pointed out. (B.S.)

Additional details

Additional titles

Original title (Czech)
Iontova implantance: moznosti a vyuziti

Publishing Information

Journal Title
Cesk. Cas. Fys.
Journal Volume
25
Journal Issue
2
Series
Cesk. Cas. Fys.
Journal Page Range
128-138

INIS

Country of Publication
Serbia and Montenegro
Country of Input or Organization
Serbia and Montenegro
INIS RN
7224214
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S07: ISOTOPES AND RADIATION SOURCES;
Descriptors DEI
FORECASTING; INDUSTRY; ION IMPLANTATION; MOS TRANSISTORS; REVIEWS; SOLIDS; USES
Descriptors DEC
DOCUMENT TYPES; SEMICONDUCTOR DEVICES; TRANSISTORS