Commissioning of the Phase I Superconducting X-ray Lithography Source (SXLS) at BNL

The goal of the SXLS Project at BNL is to design and construct a compact storage ring as a soft x-ray source for proximity printing x-ray lithography. The final ring will operate at an energy of 700 MeV and it will make use of superconducting dipoles, B0 = 3.87 Tesla and ρ = 60 centimeters, as a source of λc = 10 angstrom x-rays. The project is proceeding in two phases: in Phase 1 low field iron dipoles (B = 1.1 Tesla) are being used to study the ring at energies of 200 MeV and below; in Phase 2 the low field dipoles will be replaced with superconducting dipoles. The Phase 1 storage ring was commissioned during the fall of 1990 and the design current of 500 ma has been exceeded. A report on the performance of the Phase 1 ring is presented