Published January 1979 | Version v1
Journal article

Effect of gas composition on the deposition of ZrC-C mixtures: the bromide process

  • 1. Japan Atomic Energy Research Inst., Tokai, Ibaraki. Tokai Research Establishment

Description

Mixtures of ZrC-C were chemically vapour deposited from gaseous mixtures of zirconium bromides, methane, hydrogen and argon. The effect of gas composition on the deposition behaviour was studied. The experiments have shown that the methane concentration in the feed gas mixtures is a crucial factor in determining the deposition rate and the character of the deposit. Chemical equilibria in the Zr-C-H-Br system were calculated and compared with the experimental results. (author)

Additional details

Publishing Information

Journal Title
J. Mater. Sci.
Journal Volume
14
Journal Issue
1
Series
J. Mater. Sci.
Journal Page Range
125-132
ISSN
0022-2461