Published September 2018
| Version v1
Journal article
Electroforming-free TaOx memristors using focused ion beam irradiations
- 1. Sandia National Laboratories, Albuquerque, NM (United States)
Description
We demonstrate creation of electroforming-free TaOx memristive devices using focused ion beam irradiations to locally define conductive filaments in TaOx films. Electrical characterization shows that these irradiations directly create fully functional memristors without the need for electroforming. Ion beam forming of conductive filaments combined with state-of-the-art nano-patterning presents a CMOS compatible approach to wafer-level fabrication of fully formed operational memristors. (orig.)
Availability note (English)
Available from: http://dx.doi.org/10.1007/s00339-018-2041-3Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics. A, Materials Science and Processing
- Journal Volume
- 124
- Journal Issue
- 9
- Journal Page Range
- p. 1-6
- ISSN
- 0947-8396
- CODEN
- APAMFC
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 49098324
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ELECTRIC CONDUCTIVITY; FABRICATION; FILAMENTS; FILMS; ION BEAMS; ION IMPLANTATION; IRRADIATION; RESISTORS; SEMICONDUCTOR STORAGE DEVICES; TANTALUM OXIDES
- Descriptors DEC
- BEAMS; CHALCOGENIDES; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; EQUIPMENT; MEMORY DEVICES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; REFRACTORY METAL COMPOUNDS; SEMICONDUCTOR DEVICES; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS