Published September 16, 1993
| Version v1
Journal article
Cubic boron nitride films formed by DC plasma CVD
Description
In our present work, cBN films were deposited on Si wafers by dc plasma CVD. Experimental results have shown a high growth rate, and the obtained films consisted of almost single cBN under some deposition conditions. (orig.)
Additional details
Publishing Information
- Journal Title
- Physica Status Solidi. A, Applied Research
- Journal Volume
- 139
- Journal Issue
- 1
- Journal Page Range
- p. K25-K28.
- ISSN
- 0031-8965
- CODEN
- PSSABA
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 25021390
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BORON NITRIDES; CUBIC LATTICES; DEPOSITION; FILM CONDENSATION; THIN FILMS
- Descriptors DEC
- BORON COMPOUNDS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; FILMS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; VAPOR CONDENSATION