Method and equipment for forming multilayer intermediate structures in the production of antiemission coatings

In the paper the method and equipment for forming antiemission coatings based on platinum and zirconium are described. This method is based on the preliminary formation of a multi-layer complex structure consisting of layers of different compositions, with high-temperature annealing of which it is possible to obtain a high-quality layer of zirconium carbide. Later this layer serves as the basis for obtaining one of the most promising types of anti-emission coatings - Pt₃Zr. To implement this method an electronic device with a microprocessor module was developed that allows controlling the pressure in the working chamber, as well as regulating the voltages and currents in the vacuum arc installation. (paper)