Low-kilovolt coherent electron diffractive imaging instrument based on a single-atom electron source
Creators
- 1. Department of Physics, National Taiwan University, Taipei 10617, Taiwan (China)
- 2. Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan (China)
- 3. Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan (China)
Description
In this work, a transmission-type, low-kilovolt coherent electron diffractive imaging instrument was constructed. It comprised a single-atom field emitter, a triple-element electrostatic lens, a sample holder, and a retractable delay line detector to record the diffraction patterns at different positions behind the sample. It was designed to image materials thinner than 3 nm. The authors analyzed the asymmetric triple-element electrostatic lens for focusing the electron beams and achieved a focused beam spot of 87 nm on the sample plane at the electron energy of 2 kV. High-angle coherent diffraction patterns of a suspended graphene sample corresponding to (0.62 Å)−1 were recorded. This work demonstrated the potential of coherent diffractive imaging of thin two-dimensional materials, biological molecules, and nano-objects at a voltage between 1 and 10 kV. The ultimate goal of this instrument is to achieve atomic resolution of these materials with high contrast and little radiation damage
Additional details
Identifiers
- DOI
- 10.1116/1.4938408;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Journal Volume
- 34
- Journal Issue
- 2
- Journal Page Range
- p. 021602-021602.6
- ISSN
- 0734-2101
- CODEN
- JVTAD6
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47059879
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- ATOMS; DESIGN; DIFFRACTION; ELECTRIC POTENTIAL; ELECTRON BEAMS; ELECTROSTATIC LENSES; FOCUSING; GRAPHENE; MATERIALS; RADIATION EFFECTS; RESOLUTION; SAMPLE HOLDERS; TWO-DIMENSIONAL SYSTEMS
- Descriptors DEC
- BEAMS; CARBON; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; ELEMENTS; LENSES; LEPTON BEAMS; NONMETALS; PARTICLE BEAMS; SCATTERING
Optional Information
- Notes
- (c) 2015 American Vacuum Society