Published October 15, 2009 | Version v1
Journal article

Study of GaN adsorption on the Si surface

  • 1. Laboratory of Quantum Information Technology, School of Physics and Telecommunication Engineering, South China Normal University, 510006 Guangzhou (China)
  • 2. School of Computer, South China Normal University, 510006 Guangzhou (China)

Description

The adsorption energy, the band structures and DOS (density of states) of GaN on surface of Si(1 0 0) and Si(1 1 1) are calculated by the first-principle using plane-wave pseudo-potentials method based on the density functional theory in order to know the adsorption between the surface of Si and GaN. The calculation results show that GaN is easier adsorbed on the surface of Si(1 0 0) than the surface of Si(1 1 1) under the same experimental condition. There are strong charge distributions between N and Si atom. The bandgap of GaN on surface of Si(1 0 0) becomes a little narrower than that of pure GaN. On the other hand, GaN film is deposited on the surface of Si(1 0 0) by ECR-MOPECVD (electron cyclotron resonance-plasma enhanced chemical vapor deposition) at low temperature. For substrate of Si(1 1 1), no film is obtained under the same experimental condition.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.apsusc.2009.07.109

Additional details

Identifiers

DOI
10.1016/j.apsusc.2009.07.109;
PII
S0169-4332(09)01118-0;

Publishing Information

Journal Title
Applied Surface Science
Journal Volume
256
Journal Issue
1
Journal Page Range
p. 191-193
ISSN
0169-4332
CODEN
ASUSEE

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.