Published December 2001
| Version v1
Journal article
Study of preparation for the films of zirconium oxide with nm particles
Creators
- 1. Sichuan Univ., Chengdu (China). Key Lab for Radiation Physics and Technology of Education Ministry of China, Inst. of Nuclear Science and Technology
Description
Zr is deposited on the substrates with ion beam sputtering, at the same time, with oxygen ion beam bombarding. It is found that zirconium oxides formed from amorphous to crystallites are dependent on the densities of the bombarding oxygen ions beam, where the size of the crystallite is in the range of nm particles. And the critical densities of the bombarding oxygen ion beam for the formation of the nm particles are different from different substrate materials. Also the phase structure and chemical composition of the nm particles are analyzed in this paper
Additional details
Publishing Information
- Journal Title
- Journal of Sichuan University. Natural Science Edition
- Journal Volume
- 38
- Journal Issue
- 6
- Journal Page Range
- p. 852-855
- ISSN
- 0490-6756
- CODEN
- SCTHAO
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 35033162
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CHEMICAL COMPOSITION; CRYSTALLIZATION; DEPOSITION; ION BEAMS; NANOSTRUCTURES; OXYGEN IONS; PHASE STUDIES; SPUTTERING; SUBSTRATES; THIN FILMS; ZIRCONIUM OXIDES
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CHARGED PARTICLES; FILMS; IONS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS