Soft x-ray source by laser produced Xe plasma

The laser plasma soft X-ray source in the wavelength rage of 5-17 nm was developed, which consisted of the rotating drum system supplying cryogenic Xe target and the high repetition rate pulse Nd:YAG slab laser. We found the maximum conversion efficiency of 30% and it demonstrated the soft X-ray generation with the high repetition rate pulse of 320 pps and the high average power of 20 W. The soft X-ray cylindrical mirror was developed and successfully focused the soft X-ray with an energy intensity of 1.3 mJ/cm2. We also succeeded in the plasma debris mitigation with Ar gas. This will allow a long lifetime of the mirror and a focusing power intensity of 400 mW/cm2 with 320 pps. The high power soft X-ray is useful for various applications. (author)