Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

This paper presents the fabrication, modeling and characterization of an out-of-plane electret-based vibrational energy harvester (e-VEH) that has both positive and negative charged electret plates integrated into a single seismic mass system. Strong electrostatic spring-softening effect is induced due to the electric field provided by the double-charged electret plates. An elastic stopper is introduced for reliability concern by limiting the motion of seismic mass and meanwhile serves as a functional element to realize spring-hardening effect. The device has an overall volume of about 0.14 cm³ and is fabricated based on MEMS compatible silicon micromachining technology. When subject to weak excitations, the device exhibits an approximately linear frequency response but changes to a significantly larger broadband when strongly excited due to the combined nonlinear effect from electrostatic force and a mechanical elastic stopper. At a high excitation level of 0.48 g, the experimental results show that the device has 3 dB bandwidths of 3.7 Hz for frequency-up sweep and 2.8 Hz for frequency-down sweep, respectively, which demonstrate a large enhancement compared to the linear response (1.3 Hz). An optimal output power of 0.95 μW is also achieved with a low resonance of 95 Hz. This corresponds to a normalized power density of 37.4 μW cm⁻³ g⁻². (paper)