Precision interferometric measurement of right angles with the aid of an etalon

Full text: An interferometric set up has been developed to measure right angles between faces of components such as prisms or cubes, to sub arc second resolution. The component to be measured is placed inside an air spaced etalon and the right angle is measured by a Fizeau interferometer with respect to a transmission reference flat. The etalon consists of two precision glass flats which are aligned to be parallel by optically contacting these to a cylindrical Zerodur sleeve having flat and parallel ends. A circular cut out in the cylindrical sleeve is made to allow the test component and the light from the interferometer to enter the etalon. The phase difference in the two halves of the interferogram corresponding to the two sides of the test component is a measure of the angle deviation from 90 deg