Published 1995 | Version v1
Journal article Metadata-only

A comparative study on microstructure and tribological properties of Si3N4 and TiN thin films produced by IBED method

Creators

  • 1. Qinghua Univ., Beijing, BJ (China)
  • 2. Academia Sinica, Beijing, BJ (China)

Description

In this paper, the tribological properties of Si3N4 and TiN thin films produced by ion beam enhanced deposition (IBED) method were compared on an SRV friction and wear testing machine. In order to understand the reasons of their excellent properties the microstructure, microhardness and bonding strength with the substrate were analysed by SEM, X-ray diffraction, Knoop hardness test and scratching test methods separately. The results show that the TiN(1) films exhibits the best tribological properties, which are closely related with its higher hardness and bonding strength. (author)

Additional details

Publishing Information

Journal Title
Ceramics International
Journal Volume
21
Journal Issue
6
Journal Page Range
p. 433-438.
ISSN
0272-8842
CODEN
CINNDH

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
27004028
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ADHESION; COMPARATIVE EVALUATIONS; ION BEAMS; MICROHARDNESS; MICROSTRUCTURE; SILICON NITRIDES; THIN FILMS; TITANIUM NITRIDES; TRIBOLOGY; VAPOR DEPOSITED COATINGS; WEAR RESISTANCE
Descriptors DEC
BEAMS; COATINGS; CRYSTAL STRUCTURE; EVALUATION; FILMS; HARDNESS; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS