Development of an atmospheric-pressure homogeneous and cold Ar/O2 plasma source operating in glow discharge

An atmospheric-pressure Ar/O2 glow discharge is generated in a parallel bare metal plate reactor with a radio-frequency power supply by introducing a dielectric strip in the inlet of the gas flow. The role of the dielectric strip is discussed experimentally. The allowable oxygen-to-argon ratio reaches 1.0 vol % and the generated Ar/O2 plasma discharge is characterized by a low gas temperature and good spatial homogeneity, implying its feasible application as a type of material treatment for a large-area surface, as illustrated experimentally by the ashing of carbon black.