Published 1989 | Version v1
Journal article

Atomic mixing of multi-component materials: the dilute limit

  • 1. Universidad Complutense de Madrid (Spain). Facultad de Ciencias Fisicas
  • 2. Universitat d'Alicant (Spain). Dept. de Fisica Aplicada

Description

A formalism for the analysis of ion-induced desorption of overlayers is discussed. The approach is based on a linearization of the equations developed by Sigmund et al for the sputtering of multi-component targets. The parameters entering the evolution equation for the concentration profiles are evaluated and commented upon for two atomic mixing mechanisms. (author)

Additional details

Publishing Information

Journal Title
Vacuum
Journal Volume
39
Journal Issue
7-8
Series
Vacuum.
Journal Page Range
695-699
ISSN
0042-207X
CODEN
VACUA

Conference

Title
1. Iberian meeting on vacuum and its applications.
Dates
28 Sep - 1 Oct 1988.
Place
Braga (Portugal).

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
21012015
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DESORPTION; EQUATIONS; ION BEAMS; ION COLLISIONS; LAYERS; QUANTITY RATIO; SPUTTERING; SURFACES; TARGETS
Descriptors DEC
BEAMS; COLLISIONS