Published 2011
| Version v1
Miscellaneous
High-current pulsed magnetron discharge with plasma self-acceleration
Description
A complex penetration and optical studies of the plasma discharge have been carried out; besides, the energy distribution of ions arriving on the substrate from the plasma discharge has been described. Physical and mathematical models for calculating the temperature field in the cathode have been created. Models explaining the extremely high pulse rate of coating in high-current pulsed magnetron discharge have also been developed
Availability note (English)
Available from NRNU MEPHI, Russian Federation, 115409, Moscow, Kashirskoe sh., 31. E-mail: library@mephi.ruAbstract (Russian)
Проведены комплексные зондовое и оптическое исследования плазмы разряда, а также измерено энергетическое распределение ионов, приходящих на подложку из плазмы разряда. Созданы физико-математические модели для расчета поля температур в катоде. Построены модели, объясняющие сверхвысокие импульсные скорости нанесения покрытий в сильноточном импульсном магнетронном разрядеAdditional details
Additional titles
- Original title (Russian)
- Sil'notochnyj impul'snyj magnetronnyj razryad s avtouskoreniem plazmy
Publishing Information
- Imprint Pagination
- 22 p.
- Report number
- INIS-RU--597
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 45100151
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Thesis, Non-conventional Literature
- Descriptors DEI
- ELECTRIC DISCHARGES; MAGNETIC FIELDS; MAGNETRONS; PLASMA; PLASMA ACCELERATION; SPUTTERING
- Descriptors DEC
- ACCELERATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES
Optional Information
- Notes
- 11 refs., 8 figs.