Influence of ion bombardment in argon on the structure of aluminium thin films

Change of the structure of aluminium condensates of up to 1 μm thickness due to argon ion bombardment on the cathode of glow discharge was studied by the illuminating electron diffractometry. Increase of lattice of parameter broadening of diffraction maxima and anomalous incoherent electron scattering after the film bombardment with argon ions has been discovered. The interaction mechanism of discharge ions and a metal film is discussed depending on the discharge parameters