Light-bias coupling erase process for non-volatile zinc tin oxide TFT memory with a nickel nanocrystals charge trap layer
- 1. Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan (China)
- 2. Department of Materials Science, National Tainan University, Tainan 70005, Taiwan (China)
Description
A nonvolatile charge trapping memory is demonstrated on a thin film transistor (TFT) using a solution processed ultra-thin (∼7 nm) zinc tin oxide (ZTO) semiconductor layer with an Al2O3/Ni-nanocrystals (NCs)/SiO2 dielectric stack. A positive threshold voltage (V TH) shift of 7 V is achieved at gate programming voltage of 40 V for 1 s but the state will not be erased by applying negative gate voltage. However, the programmed V TH shift can be expediently erased by applying a gate voltage of −10 V in conjunction with visible light illumination for 1 s. It is found that the sub-threshold swing (SS) deteriorates slightly under light illumination, indicating that photo-ionized oxygen vacancies ( and/or ) are trapped at the interface between Al2O3 and ZTO, which assists the capture of electrons discharged from the Ni NCs charge trapping layer. The light-bias coupling action and the role of ultra-thin ZTO thickness are discussed to elucidate the efficient erasing mechanism. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0022-3727/49/11/115104Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. D, Applied Physics
- Journal Volume
- 49
- Journal Issue
- 11
- Journal Page Range
- [7 p.]
- ISSN
- 0022-3727
- CODEN
- JPAPBE
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 51046385
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- ALUMINIUM OXIDES; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; NANOCRYSTALS; NICKEL; SEMICONDUCTOR MATERIALS; SILICON OXIDES; THICKNESS; THIN FILMS; TIN OXIDES; TRANSISTORS; TRAPPING; VACANCIES; VISIBLE RADIATION; ZINC
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; CRYSTALS; DIMENSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; MATERIALS; METALS; NANOSTRUCTURES; OXIDES; OXYGEN COMPOUNDS; POINT DEFECTS; RADIATIONS; SEMICONDUCTOR DEVICES; SILICON COMPOUNDS; TIN COMPOUNDS; TRANSITION ELEMENTS