Published 2012 | Version v1
Miscellaneous Open

Study of secondary ion emission of impurities of GaN/SiC depending on annealing temperature

  • 1. Inst. Ehlektroniki AN RUz, Tashkent (Uzbekistan)
  • 2. FTI im. Ioffe, Sankt-Peterburg (Russian Federation)
  • 3. Fiziko-Tekhnicheskij Inst. AN RUz, Tashkent (Uzbekistan)

Description

no abstract available

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Part of:
Summaries of reports of XLII International Tulinov conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Исследование вторично-ионной эмиссии примесей GaN/SiC в зависимости от температуры отжига

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XLII International Tulinov conference on physics of interactions of charged particles with crystals
Imprint Pagination
222 p.
Journal Page Range
p. 107
Report number
INIS-RU--536

Conference

Title
42. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
XLII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
29-31 May 2012
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
45105078
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
ADSORPTION; ANNEALING; EXPERIMENTAL DATA; GALLIUM NITRIDES; IMPURITIES; ION EMISSION; SECONDARY EMISSION; SILICON CARBIDES; SPUTTERING; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; DATA; EMISSION; GALLIUM COMPOUNDS; HEAT TREATMENTS; INFORMATION; NITRIDES; NITROGEN COMPOUNDS; NUMERICAL DATA; PNICTIDES; SILICON COMPOUNDS; SORPTION; TEMPERATURE RANGE

Optional Information

Notes
1 fig. Imprint:Tezisy dokladov XLII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami