Published April 1987
| Version v1
Journal article
To the technique on the determination of velocities of excited particles sputtered at the ion bombardment of solids
Creators
- 1. Khar'kovskij Gosudarstvennyj Univ. (Ukrainian SSR)
Description
The character of the dependences of the mean number of excited particles sputtered at the ion bombardment has been considered theoretically against the distance to the surface with account taken of the finite sizes of the target and the spatial distribution of the excited particles
Additional details
Additional titles
- Original title (Russian)
- К методике определения скоростей возбужденных частиц, распыленных при ионной бомбардировке твердых тел
Publishing Information
- Journal Title
- Poverkhn.: Fiz., Khim., Mekh.
- Journal Issue
- no.4
- Series
- Poverkhn.: Fiz., Khim., Mekh.
- CODEN
- PFKMD
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 19010186
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ANALYTICAL SOLUTION; DISTRIBUTION FUNCTIONS; ION BEAMS; ION EMISSION; PHOTON EMISSION; RADIATION FLUX; SOLIDS; SPATIAL DISTRIBUTION; SPUTTERING
- Descriptors DEC
- BEAMS; DISTRIBUTION; EMISSION