Statistical properties of microrelief developing during ion bombardment of surfaces

Statistical analysis of microrelief characteristics of a multicomponent polycrystalline material (steel) after nitrogen and argon ion bombardment is carried out. It is found that the grained structure of an example is manifested both in the roughness height distributions and in correlation properties of profiles. Roughness height distributions of surfaces differ from the normal distribution, have the bimodality, which is connected with the presence of different groups of grains with different sputtering coefficients